The HYD 690 is the compact version of the highly successful LF-690 series regulator, it has been designed as an economical alternative to the LF-690, yet still incorporates all the key features of the larger regulator. The Tungsten carbide main valve and 17-4PH SS seat provide ultimate protection against the harsh service encountered on hydraulic services and can now be easily serviced from the spring section. The regulator is self relieving with

SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow. FEATURES Very fast response < 0,7 - 1,2 sec flow settling time Metal/rubber seals Flow 1 SCCM - 20 SLM (12 models available) Leak integrity < 1 x 10-11 Pa m3/s He (Viton 10-8) BENEFITS Monitoring of operation using digital interface is possible Minimal particle generation Long operation life

With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion. FEATURES Pressure-insensitive operation High accuracy and repeatability Integrated gas panel components Live gas certified, multi-gas, multi-range configuration Field programmable DeviceNet,

G1 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few models

G3 models satisty the demand for the next generation of samiconductor production. FEATURES Multi-gas,multi-range selection Pressure-insensitive operation Pl LCD display (temp, pressure, set output) easifies control routines Self celibration function BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few mod

G2 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Valve shut-off function Self calibration function BENEFITS Shortening gas purge time needed Complete gas shut-off Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve) Reduction of gas surge Allows one mass flow controller to handle two or more gas types and ranges The

Hitachi Metals Area® FC-R7800 series delivers precise flow control, as well as the corrosion resistance and high leak integrity of metal seals, to suit the majority of gas-controlled applications. FEATURES Corrosion-resistant design Metal seals VCR®, Swagelok® compatible connections Full-scale flow ranges from 10 sccm to 200 slm Normally-closed or normally -open solenoid control valve Leak integrity of 1 × 10-10 atm-cc/

SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers. A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation. FEATURES Higher operating temperature 150 °C Built-in structure to prevent recondensation Fast response < 1 sec flow

Worldwide, the Aera name is synonymous with high-quality, highperforming designs that are backed by exceptionally responsive customer service. FEATURES Multi-gas, multi-range selection Fast response All-metal seals Field programmable* Wide range of gas selection without recalibration* DeviceNet, RS-485, or analog control Multiple alarm and diagnostic capabilities RoHS compliant *Available in multi-gas, multi-range Transformer MFCs

An economical heated regulator available in ‘side entry’ or ‘in-line’ heat transfer options to maintain sample gases in their vapour state. The ‘in-line’ design maximizes the heat transfer area via a unique spiral machined heater sheath, which mixes the gas and ensures efficient heat transfer. The ‘side entry’ design can be used in applications where heat transfer is less critical, and where install