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AERA PI-980 SERIES

Group Number: 4960

With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.

FEATURES

  • Pressure-insensitive operation
  • High accuracy and repeatability Integrated gas panel components
  • Live gas certified, multi-gas, multi-range configuration
  • Field programmable
  • DeviceNet, RS-485, and analog control
  • All-metal seals and ultra-pure design

BENEFITS

  • Improved gas delivery performance and production yields
  • Easy integration on tool
  • Substantial gas panel cost savings
  • Reduced gas panel foot print
  • Real-time communication and control
  • World-class service and support
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