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Home » SAM® 1480/2480 G3 SERIES

SAM® 1480/2480 G3 SERIES

Group Number: 4960

G3 models satisty the demand for the next generation of samiconductor production.

FEATURES

  • Multi-gas,multi-range selection
  • Pressure-insensitive operation Pl
  • LCD display (temp, pressure, set output) easifies control routines
  • Self celibration function

BENEFITS

  • Great inlet pressure change insensitivity
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investment and inventory liability
  • Performance maintained after gas change
  • Shortening gas purge time needed
  • Complete gas shut-off
  • Gas leaking volume 1/10 related to that with a standart combination (MFC and pneumatic valve)
  • Reduction of gas surge
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investmen and inventory liability
  • Performace maintained after gas change
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Additional Downloads for this Product

Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf
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