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SAM® 1480/2480 G2 SERIES

Group Number: 4960

G2 models satisfy the demand for the next generation of semiconductor production.

FEATURES

  • Multi-gas, multi-range selection
  • Valve shut-off function
  • Self calibration function

BENEFITS

  • Shortening gas purge time needed
  • Complete gas shut-off
  • Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
  • Reduction of gas surge
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investment and inventory liability
  • Performance maintained after gas change
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Additional Downloads for this Product

Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf
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