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Home » SAM® 1480/2480 G4 SERIES

SAM® 1480/2480 G4 SERIES

Group Number: 4960

G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production.

FEATURES

  • Multi-gas, multi-range selection
  • Pressure-insensitive operation
  • Valve shut-off function
  • In-line integrated flow verification system
  • Self celibration function
  • LCD display (temp, pressure, set, output) easifies control routines

BENEFITS

  • Great inlet pressure change insensitivity
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investment and inventory liability
  • Performance maintained after gas change
  • Shortening gas purge time needed
  • Complete gas shut-off
  • Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
  • Reduction of ga surge
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investmen and inventory liability
  • Performace mainted after gas change
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Additional Downloads for this Product

Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf
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